The University of Southampton

Unveiling Installation of JEOL JBX-8100FS G3 in Southampton

Published: 27 March 2024

The University of Southampton’s Zepler Cleanrooms recently installed the first JBX-8100FS G3 outside of Japan. The system has Gaussian Beam Optics designed to implement High Throughput and High Precision requirements from a wide range of applications.

Commenting on the new investment, Professor Martin Charlton of the University of Southampton said: “We are highly privileged to be the first facility outside Japan to host this next generation 200KV Electron Beam Lithography System. Leveraging over 30 years of experience in electron beam lithography, Southampton is poised for exciting research opportunities. This equipment will play a pivotal role in advancing developments in quantum computing, silicon photonics, and next-generation electronic systems. The machine, coupled with our existing suite of microfabrication equipment, positions Southampton at the forefront of this field.”

Ahead of the formal launch scheduled later this year, the University hosted a UK GenISys BEAMeeting in February. The event drew a substantial audience, including customers and students, with over 40 participants. The primary focus was on training staff to generate machine-readable files, ensuring effective utilization of the new JEOL JBX 8100.

Daniel Ritter, Senior Corporate Application Support at GenISys, said: “Resuming, after the COVID pandemic, the annually training session GenISys visited again Southampton University to provide a training session for the BEAMER and TRACER products. About 40 participants listened in and insights in software operation and strategies for data preparation were given to enable the users to utilise all the benefits for the newly installed JEOL JBX 8100 over the course of a two-day training.”

Dr. Colin Mitchell, Senior Research Fellow, said: “It's always good to talk to the experts who work on a specific tool. Daniel Ritter, the main presenter, brought years of experience, providing useful tips and addressing ongoing work-related issues with solutions and suggestions.”

He added: “Overall, the event was not only informative but also engaging, striking a balance between understanding the broader capabilities and acquiring the essential 'how-to' knowledge.”

On the final day, an interactive session was held with academics from Cardiff, Cambridge, Royal Holloway and internal users – the purpose of this session was to discuss the current research related to e-beam technology and the current research at Southampton was also showcased.

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