|Publication No: 4268||Search all ORC publications|
Flow monitoring in optofluidic channels using planar Bragg gratings
C.Holmes, J.C.Gates, C.B.E.Gawith, P.G.R.Smith
An integrated pressure/flow sensor using a direct UV written planar Bragg grating situated inside a flexible diaphragm of thickness 200ým has been fabricated. The diaphragm is created by etching away the underlying silicon support.
CLEO/IQEC 2009 Baltimore 31 May - 5 Jun (2009)
Copyright University of Southampton 2006