|Publication No: 2277||Search all ORC publications|
Silicon-based photonic crystal structures
G.J.Parker, M.D.B.Charlton, M.E.Zoorob, J.J.Baumberg, M.C.Netti*, S.J.Cox, J.S.Wilkinson*
Department of Electronics & Computer Science, and Optoelectronics Research Centre, The University of Southampton, UK
It is likely that the commercialisation of Photonic Crystal (PC) technology will require the high-volume capabilities provided by semiconductor nanofabrication processes. To this end, a Silicon-compatible PC waveguide could form the basic building block of an all-optical circuit. This presentation will discuss the development of PC research at Southampton University (UK) which began with deep photoelectrochemically etched holes in single-crystal Silicon. This initial work progressed to an all dielectric waveguide structure on a Silicon substrate, with the materials utilised being compatible with a CMOS process. PC nanofabrication and optical characterisation using these waveguiding structures will be described in detail.
The Knowledge Foundation International Conference on Photonic Nanostructures San Diego, California, USA (2001)
Publisher′s URL: http://www.knowledgepress.com/
Copyright University of Southampton 2006