Integrated optical dual-cantilever arrays in silica on silicon
Integrated optical dual-cantilever arrays in silica on silicon
A dual cantilever device has been demonstrated which can operate as a force sensor or variable attenuator. The device is fabricated using physical micromachining techniques that do not require cleanroom class facilities. The response of the device to mechanical actuation is measured, and shown to be well described by conventional fiber optic angular misalignment theory. The device has the potential to be utilized within integrated optical components for sensors or attenuators. An array of devices was fabricated with potential for parallel operation.
31801-31813
Cooper, Peter A.
29354b98-c117-4ace-9ca4-1d3ad531485f
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Mennea, Paolo
d994ba05-bcc1-4be3-8ba1-439fb1535a3f
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Gates, James C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, Peter G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
2014
Cooper, Peter A.
29354b98-c117-4ace-9ca4-1d3ad531485f
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Mennea, Paolo
d994ba05-bcc1-4be3-8ba1-439fb1535a3f
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Gates, James C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, Peter G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Cooper, Peter A., Carpenter, Lewis, Mennea, Paolo, Holmes, Christopher, Gates, James C. and Smith, Peter G.R.
(2014)
Integrated optical dual-cantilever arrays in silica on silicon.
Optics Express, 22 (26), .
(doi:10.1364/OE.22.031801).
Abstract
A dual cantilever device has been demonstrated which can operate as a force sensor or variable attenuator. The device is fabricated using physical micromachining techniques that do not require cleanroom class facilities. The response of the device to mechanical actuation is measured, and shown to be well described by conventional fiber optic angular misalignment theory. The device has the potential to be utilized within integrated optical components for sensors or attenuators. An array of devices was fabricated with potential for parallel operation.
More information
Accepted/In Press date: 10 November 2014
Published date: 2014
Organisations:
Optoelectronics Research Centre
Identifiers
Local EPrints ID: 375055
URI: http://eprints.soton.ac.uk/id/eprint/375055
ISSN: 1094-4087
PURE UUID: 052eaaa3-3975-48bf-95b5-ad73b3fcc30f
Catalogue record
Date deposited: 11 Mar 2015 12:09
Last modified: 15 Mar 2024 03:27
Export record
Altmetrics
Contributors
Author:
Peter A. Cooper
Author:
Lewis Carpenter
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.
View more statistics
