Low temperature hot-wire polysilicon waveguides
Low temperature hot-wire polysilicon waveguides
We fabricated and measured low loss polysilicon waveguides deposited using Hot-Wire Chemical Vapor Deposition (HWCVD) at 240 °C. The optical propagation loss was measured to be 11.9 dB/cm at lambda = 1550 nm.
Ben Masaud, Taha M.
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Tarazona, A.
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Chen, Xia
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Reed, Graham T.
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Chong, Harold M.H.
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Ben Masaud, Taha M.
4b4264c4-210b-4d14-9e2c-3fb8ccbc5b6b
Tarazona, A.
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Chong, Harold M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Ben Masaud, Taha M., Tarazona, A., Chen, Xia, Reed, Graham T. and Chong, Harold M.H.
(2013)
Low temperature hot-wire polysilicon waveguides.
Conference on Lasers and Electro-Optics Pacific Rim, , Kyoto, Japan.
30 Jun - 04 Jul 2013.
Record type:
Conference or Workshop Item
(Paper)
Abstract
We fabricated and measured low loss polysilicon waveguides deposited using Hot-Wire Chemical Vapor Deposition (HWCVD) at 240 °C. The optical propagation loss was measured to be 11.9 dB/cm at lambda = 1550 nm.
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e-pub ahead of print date: 30 June 2013
Venue - Dates:
Conference on Lasers and Electro-Optics Pacific Rim, , Kyoto, Japan, 2013-06-30 - 2013-07-04
Organisations:
Optoelectronics Research Centre, Mathematical Sciences, Nanoelectronics and Nanotechnology, Civil Maritime & Env. Eng & Sci Unit
Identifiers
Local EPrints ID: 351683
URI: http://eprints.soton.ac.uk/id/eprint/351683
PURE UUID: bb2e8882-3328-478c-aa36-ccfd11960c0a
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Date deposited: 25 Apr 2013 10:11
Last modified: 15 Mar 2024 03:30
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Contributors
Author:
Taha M. Ben Masaud
Author:
A. Tarazona
Author:
Xia Chen
Author:
Harold M.H. Chong
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