The University of Southampton
University of Southampton Institutional Repository

Micro-mechanical integrated optical structures

Micro-mechanical integrated optical structures
Micro-mechanical integrated optical structures
The work presented, reports recent developments in the fabrication of micro-mechanical integrated optical components. Combining physical micromachining and direct UV-writing, micro-membranes micro-cantilevers and microbridge structures are fabricated.
Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Cooper, P.A.
29354b98-c117-4ace-9ca4-1d3ad531485f
Rogers, Helen
c6b6aa89-b14c-48b6-92c0-dd5c5bca683c
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Cooper, P.A.
29354b98-c117-4ace-9ca4-1d3ad531485f
Rogers, Helen
c6b6aa89-b14c-48b6-92c0-dd5c5bca683c
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6

Holmes, C., Carpenter, Lewis, Cooper, P.A., Rogers, Helen, Gates, J.C. and Smith, P.G.R. (2012) Micro-mechanical integrated optical structures. European Conference on Integrated Optics (ECIO), Sitges Barcelona, Sitges, Spain. 18 - 24 Apr 2012. 2 pp .

Record type: Conference or Workshop Item (Paper)

Abstract

The work presented, reports recent developments in the fabrication of micro-mechanical integrated optical components. Combining physical micromachining and direct UV-writing, micro-membranes micro-cantilevers and microbridge structures are fabricated.

Text
5369.pdf - Other
Download (90kB)

More information

Published date: April 2012
Venue - Dates: European Conference on Integrated Optics (ECIO), Sitges Barcelona, Sitges, Spain, 2012-04-18 - 2012-04-24
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 379732
URI: http://eprints.soton.ac.uk/id/eprint/379732
PURE UUID: 12ddf9b5-2cb6-4bd5-921e-efbd82a7a505
ORCID for C. Holmes: ORCID iD orcid.org/0000-0001-9021-3760
ORCID for J.C. Gates: ORCID iD orcid.org/0000-0001-8671-5987
ORCID for P.G.R. Smith: ORCID iD orcid.org/0000-0003-0319-718X

Catalogue record

Date deposited: 30 Jul 2015 15:35
Last modified: 15 Mar 2024 03:27

Export record

Contributors

Author: C. Holmes ORCID iD
Author: Lewis Carpenter
Author: P.A. Cooper
Author: Helen Rogers
Author: J.C. Gates ORCID iD
Author: P.G.R. Smith ORCID iD

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×