Planar micromachined glass cantilevers utilising integrated Bragg Fabry-Perot cavities

Carpenter, Lewis, Holmes, Christopher, Gates, James C. and Smith, Peter G.R. (2010) Planar micromachined glass cantilevers utilising integrated Bragg Fabry-Perot cavities. Photon 10, , Southampton, United Kingdom. 23 - 26 Aug 2010. 1 pp .

Record type: Conference or Workshop Item (Paper)

Abstract

Here we demonstrate a glass cantilever based on a unique micromachining and etching approach, combined with UV written Bragg gratings. We shall also discuss the increase in sensitivity by using two Bragg gratings to form Fabry-Pérot cavity. Cantilevers are in ultra sensitive force sensors used in applications such as Atomic Force Microscopy, mass sensing and acoustic transducers.

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e-pub ahead of print date: August 2010

Published date: August 2010

Venue - Dates: Photon 10, , Southampton, United Kingdom, 2010-08-23 - 2010-08-26

Organisations: Optoelectronics Research Centre

Learn more about Optoelectronics Research Centre research

Identifiers

Local EPrints ID: 340353

URI: http://eprints.soton.ac.uk/id/eprint/340353

PURE UUID: b2146f0f-f2fe-49fa-bd4f-0f73c7986d3a

ORCID for Christopher Holmes:

orcid.org/0000-0001-9021-3760

ORCID for James C. Gates:

orcid.org/0000-0001-8671-5987

ORCID for Peter G.R. Smith:

orcid.org/0000-0003-0319-718X

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Date deposited: 19 Jun 2012 13:54

Last modified: 15 Mar 2024 03:27

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Contributors

Author: Lewis Carpenter

Author: Christopher Holmes

Author: James C. Gates

Author: Peter G.R. Smith

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