|Publication No: 4726||Search all ORC publications|
Silica based micro-cantilevers fabricated using direct UV writing and micro machining for chemical and physical sensing applications
C.Holmes, L.G.Carpenter, H.L.Rogers, J.C.Gates, P.G.R.Smith
Cantilever-based sensors have received increasing interest over recent years, offering a completely new type of miniaturised transducer with both chemical and physical monitoring capabilities. This paper presents a resonant silica micro-cantilever with direct UV written Bragg gratings intrinsically defined within it, illustrated in Figure 1 (a). To obtain quantitative and qualitative measurements the cantilever is mechanically resonated and the spectral variations in a 'sensor' Bragg grating monitored and cross referenced against a Bragg grating in the bulk. The miniaturised device offers remote, multiplexed sensing capabilities that are conducive to flammable environments.
LPM 2010 Stuttgart 7-10 Jun (2010)
Copyright University of Southampton 2006