Investigating planar integrated glass cantilevers utilizing Bragg gratings and mechanical resonance in a vacuum

Abstract

Glass-micro-cantilever Bragg grating devices incorporate both micro-machining and direct UV writing. This novel combination of fabrication techniques reduce construction times on photolithography and allow rapid prototyping. It utilizes the cantilevers mechanical resonance to allow it to be used to detect the change in the air's damping coefficient with pressure.

ECIO 2010 Cambridge 7-9 Apr (2010)

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