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Novel actuation of an integrated peristaltic micropump

Novel actuation of an integrated peristaltic micropump
Novel actuation of an integrated peristaltic micropump
The design and production of sequencing and driver circuits to operate a peristaltic silicon micro pump integrated within a lab-on-a-chip are described. The micropump consists of three serial elements composed of piezoelectric discs glued to a 200 µm glass diaphragm, which upon actuation rise from connecting channels. Sequential actuation of the elements within the micropump in the desired fashion has been shown to pump a one microlitre droplet of water back and forth in a controlled way through the reaction chambers in the lab-on-a-chip. Two electrical circuits have been created and tested and are presented here. The relationship of the relative deflection of the three piezoelectric disks glued to a 200 µm glass diaphragm versus applied voltage has been evaluated using a Michelson interferometer. The novel actuation method developed here has successfully operated the pump and the interferometric method can now be used to optimize the pump.
micropump, peristaltic, michelson interferometer, BioMEMS, ?TAS, micro-fluidics
0167-9317
858-863
Husband, B.
88ce6797-521a-4cd2-88ca-0d8182cb9876
Bu, M.
62faacb5-690b-45af-8ee9-0c9378b48abf
Apostolopoulos, V.
8a898740-4c71-4040-a577-9b9d70530b4d
Melvin, T.
fd87f5eb-2bb9-48fa-b7be-7100ace9c50f
Evans, A.G.R.
082f720d-3830-46d7-ba87-b058af733bc3
Husband, B.
88ce6797-521a-4cd2-88ca-0d8182cb9876
Bu, M.
62faacb5-690b-45af-8ee9-0c9378b48abf
Apostolopoulos, V.
8a898740-4c71-4040-a577-9b9d70530b4d
Melvin, T.
fd87f5eb-2bb9-48fa-b7be-7100ace9c50f
Evans, A.G.R.
082f720d-3830-46d7-ba87-b058af733bc3

Husband, B., Bu, M., Apostolopoulos, V., Melvin, T. and Evans, A.G.R. (2004) Novel actuation of an integrated peristaltic micropump. Microelectronic Engineering, 73-74, 858-863. (doi:10.1016/j.mee.2004.03.065).

Record type: Article

Abstract

The design and production of sequencing and driver circuits to operate a peristaltic silicon micro pump integrated within a lab-on-a-chip are described. The micropump consists of three serial elements composed of piezoelectric discs glued to a 200 µm glass diaphragm, which upon actuation rise from connecting channels. Sequential actuation of the elements within the micropump in the desired fashion has been shown to pump a one microlitre droplet of water back and forth in a controlled way through the reaction chambers in the lab-on-a-chip. Two electrical circuits have been created and tested and are presented here. The relationship of the relative deflection of the three piezoelectric disks glued to a 200 µm glass diaphragm versus applied voltage has been evaluated using a Michelson interferometer. The novel actuation method developed here has successfully operated the pump and the interferometric method can now be used to optimize the pump.

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More information

Published date: June 2004
Keywords: micropump, peristaltic, michelson interferometer, BioMEMS, ?TAS, micro-fluidics
Organisations: Microelectronics Industrial Unit

Identifiers

Local EPrints ID: 57313
URI: http://eprints.soton.ac.uk/id/eprint/57313
ISSN: 0167-9317
PURE UUID: 21da344d-f809-4cc0-b05c-ac7a8a77f90d
ORCID for V. Apostolopoulos: ORCID iD orcid.org/0000-0003-3733-2191

Catalogue record

Date deposited: 13 Aug 2008
Last modified: 16 Mar 2024 03:56

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Contributors

Author: B. Husband
Author: M. Bu
Author: T. Melvin
Author: A.G.R. Evans

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