High purity germanium sulphide glass for optoelectronic applications synthesized by chemical vapour deposition

Abstract

Germanium-sulphide glass has been fabricated directly by chemical vapour deposition in the form of thin films on semiconductor substrates and as a bulk glass. Analysis shows a high-purity amorphous material, which has high potential for the fabrication of the chalcogenide optical waveguides and devices.

Electronics Letters (2004) Vol.40(14) pp.863-865

doi: 10.1049/el:20045141

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