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Fabrication and evaluation of SiC optical modulators

Fabrication and evaluation of SiC optical modulators
Fabrication and evaluation of SiC optical modulators
Silicon Carbide is a potentially useful compound for use in silicon based photonics because cubic silicon carbide (3C-SiC), possesses a first order electro-optic (Pockels) effect, something absent in pure silicon. This means the material is potentially suitable for high speed optical modulation. Furthermore, the wide bandgap (2.2eV) of 3C-SiC makes the devices suitable for use over the visible and near infrared spectrum range as well as the longer communication wavelengths, and also means the material can tolerate high temperatures. However, relatively little work has been carried out in SiC for photonics applications. In this paper we will discuss design and fabrication of both SiC waveguides and modulators for silicon based photonics. The fabrication process utilises ion implantation of oxygen into SiC to form the lower waveguide boundary. Subsequently ribs are etched and contacts are added to form the optical modulators. Consideration of both Pockels modulators and plasma dispersion modulators has been made, and both will be discussed here. These devices have potential for optical modulation, but are also compatible with silicon processing technology.
Si-based optoelectronics, silicon on insulator, SiC planar waveguides, SiC rib waveguides, modulators
145
Reed, G.T.
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Png, C.E.
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Mashanovich, G.Z.
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Chan, S.
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Lim, S.T.
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Vonsovici, A.
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Evans, A.G.R.
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Atta, R.
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Jackson, S.M.
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Way, A.S.
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Kewell, A.K.
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Reed, G.T.
ca08dd60-c072-4d7d-b254-75714d570139
Png, C.E.
ed888ad9-41f4-4ecb-83f6-c8f7ac652c2f
Mashanovich, G.Z.
c806e262-af80-4836-b96f-319425060051
Chan, S.
6f3a33a1-0ec1-49ee-a6ce-4eff49a43405
Lim, S.T.
d4102b14-6e4b-443e-9f09-e6ac13c74632
Vonsovici, A.
26370b2f-4400-4987-a286-24355fa91617
Evans, A.G.R.
082f720d-3830-46d7-ba87-b058af733bc3
Atta, R.
c8044599-306d-44a7-a48e-886e1f7ae45a
Jackson, S.M.
5da7a467-e02f-4c8e-907a-20306f93b844
Way, A.S.
5830ea2d-31db-4895-acaf-c084aa849358
Kewell, A.K.
9d71bb67-cc06-40a3-b98f-f7483fddb8a6

Reed, G.T., Png, C.E., Mashanovich, G.Z., Chan, S., Lim, S.T., Vonsovici, A., Evans, A.G.R., Atta, R., Jackson, S.M., Way, A.S. and Kewell, A.K. (2002) Fabrication and evaluation of SiC optical modulators. SPIE 2002. p. 145 .

Record type: Conference or Workshop Item (Paper)

Abstract

Silicon Carbide is a potentially useful compound for use in silicon based photonics because cubic silicon carbide (3C-SiC), possesses a first order electro-optic (Pockels) effect, something absent in pure silicon. This means the material is potentially suitable for high speed optical modulation. Furthermore, the wide bandgap (2.2eV) of 3C-SiC makes the devices suitable for use over the visible and near infrared spectrum range as well as the longer communication wavelengths, and also means the material can tolerate high temperatures. However, relatively little work has been carried out in SiC for photonics applications. In this paper we will discuss design and fabrication of both SiC waveguides and modulators for silicon based photonics. The fabrication process utilises ion implantation of oxygen into SiC to form the lower waveguide boundary. Subsequently ribs are etched and contacts are added to form the optical modulators. Consideration of both Pockels modulators and plasma dispersion modulators has been made, and both will be discussed here. These devices have potential for optical modulation, but are also compatible with silicon processing technology.

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More information

Published date: 2002
Venue - Dates: SPIE 2002, 2002-01-01
Keywords: Si-based optoelectronics, silicon on insulator, SiC planar waveguides, SiC rib waveguides, modulators
Organisations: Optoelectronics Research Centre, NANO

Identifiers

Local EPrints ID: 257512
URI: http://eprints.soton.ac.uk/id/eprint/257512
PURE UUID: 05b36632-2a2e-44cb-b4e2-c261a8ad6b8b

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Date deposited: 29 May 2003
Last modified: 05 Feb 2024 17:37

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Contributors

Author: G.T. Reed
Author: C.E. Png
Author: S. Chan
Author: S.T. Lim
Author: A. Vonsovici
Author: A.G.R. Evans
Author: R. Atta
Author: S.M. Jackson
Author: A.S. Way
Author: A.K. Kewell

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