|Publication No: 1877||Search all ORC publications|
Ablated gratings on borosilicate glass by 193nm excimer laser radiation
S.Pissadakis, L.Reekie, M.Hempstead, M.N.Zervas & J.S.Wilkinson
Relief gratings of 500nm period have been fabricated on Er/Yb-doped borosilicate glass substrates by laser ablation using an excimer laser at a wavelength of 193nm and a modified Mach-Zehnder interferometer. The grating fabrication process has been quantified using diffraction efficiency measurements and atomic force microscope microscans, and related to the incident energy density.
Applied Physics A: Supplement S (1999) Vol.69(7) pp.739-741
Copyright University of Southampton 2006